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[IEEE 2015 30th Symposium on Microelectronics Technology and Devices (SBMicro) - Salvador, Brazil (2015.8.31-2015.9.4)] 2015 30th Symposium on Microelectronics Technology and Devices (SBMicro) - Fresnel Zone Plate array fabricated by maskless lithography
Barea, Luis A., von Zuben, Antonio A., Brahim, Tayeb M, Montagnoli, Arlindo N., Hospital, Michel, Frateschi, N., Cirino, Giuseppe A.Year:
2015
Language:
english
DOI:
10.1109/SBMicro.2015.7298155
File:
PDF, 1.09 MB
english, 2015