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SPIE Proceedings [SPIE Photonics Asia - Beijing, China (Monday 5 November 2012)] Nanophotonics and Micro/Nano Optics - A cost-effective method for fabricating antireflection structure using self-agglomerated metal nanoparticles as etching mask
Dong, Xiaoxuan, Shen, Su, Shao, Renjin, Chen, Linsen, Zhou, Zhiping, Wada, KazumiVolume:
8564
Year:
2012
Language:
english
DOI:
10.1117/12.999910
File:
PDF, 725 KB
english, 2012