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A Simple Cost-Effective Sputtering-Based Method for Micropatterning and Materials Microstructuring
Poulopoulos, Panagiotis, Kapaklis, Vassilios, Pappas, Spiridon D., Trachylis, Dimitrios, Politis, ConstantinVolume:
10
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2010.2592
Date:
September, 2010
File:
PDF, 6.08 MB
english, 2010