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NIR Microscopy Possibilities for the Visualization of Silicon Microelectronic Structure Topology through the Substrate
Mavritskii, O.B., Egorov, A.N., Nastulyavichus, A.A., Pechenkin, A.A., Smirnov, N.A., Chumakov, A.I.Volume:
73
Year:
2015
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2015.09.152
File:
PDF, 5.68 MB
english, 2015