![](/img/cover-not-exists.png)
A New Temperature-Tolerant RF MEMS Switch Structure Design and Fabrication for Ka-Band Applications
Demirel, Kaan, Yazgan, Erdem, Demir, Simsek, Akin, TayfunYear:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2485659
File:
PDF, 5.59 MB
english, 2015