SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Optoelectronic Integrated Circuits - Wafer bonding technology and its optoelectronic applications
Lo, Yu-Hwa, Zhu, Zuhua, Qian, Yi, Ejeckam, Felix E., Christenson, Gina L., Park, Yoon-Soo, Ramaswamy, Ramu V.Volume:
3006
Year:
1997
Language:
english
DOI:
10.1117/12.264243
File:
PDF, 734 KB
english, 1997