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SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Smart Sensors, Actuators, and MEMS III - Temperature stress impact on power RF MEMS switches
Bordas, Chloé, Grenier, Katia, Dubuc, David, Paillard, Mathieu, Cazaux, Jean-Louis, Plana, Robert, Becker, Thomas, Cané, Carles, Barker, N. ScottVolume:
6589
Year:
2007
Language:
english
DOI:
10.1117/12.722010
File:
PDF, 511 KB
english, 2007