Influence of ion bombardment on structure and properties of TiZrN thin film
Lin, Yu-Wei, Huang, Jia-Hong, Yu, Ge-Ping, Hsiao, Chien-Nan, Chen, Fong-ZhiVolume:
354
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.02.190
Date:
November, 2015
File:
PDF, 658 KB
english, 2015