RF sputtering deposited a-IGZO films for LCD alignment...

Applied Surface Science 2015 / 11 Vol. 354

RF sputtering deposited a-IGZO films for LCD alignment layer application

Wu, G.M., Liu, C.Y., Sahoo, A.K.
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Volume:
354
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.04.153
Date:
November, 2015
File:
PDF, 1.59 MB
english, 2015
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