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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2013)] Design for Manufacturability through Design-Process Integration VII - Rethinking ASIC design with next generation lithography and process integration
Vaidyanathan, Kaushik, Liu, Renzhi, Liebmann, Lars, Lai, Kafai, Strojwas, Andrzej, Pileggi, Larry, Mason, Mark E., Sturtevant, John L.Volume:
8684
Year:
2013
Language:
english
DOI:
10.1117/12.2014374
File:
PDF, 1.92 MB
english, 2013