SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Micromachining Technology for Micro-Optics and Nano-Optics II - Developments in Si and SiO2 etching for MEMS-based optical applications
Donohue, Lee A., Hopkins, Janet, Barnett, Richard, Newton, Andrew, Barker, Anthony, Johnson, Eric G., Nordin, Gregory P.Volume:
5347
Year:
2003
Language:
english
DOI:
10.1117/12.524471
File:
PDF, 508 KB
english, 2003