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SPIE Proceedings [SPIE 31st Annual Technical Symposium - San Diego, CA (Sunday 17 August 1986)] Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III - Large Diffraction Grating Ruling Engine With Nanometer Digital Control System
Loewen, Erwin G., Wiley, Robert S., Portas, Geoffrey, Lerner, Jeremy M.Volume:
815
Year:
1987
Language:
english
DOI:
10.1117/12.941737
File:
PDF, 11.32 MB
english, 1987