Critical energy densities for amorphization in Ar-ion implanted silicon at low energies
I.N Koprinarov, U Müller-Jahreis, P Thiele, M Bouafia, A SeghirVolume:
227
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0375-9601(97)00053-4
File:
PDF, 393 KB
english, 1997