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Effects of substrate temperature on structural, optical and morphological properties of hydrogenated nanocrystalline silicon thin films prepared by inductively coupled plasma chemical vapor deposition
Yang, Dingyu, Zhu, Xinghua, Sun, Hui, Gao, Xiuying, Li, XuVolume:
26
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-015-3426-0
Date:
October, 2015
File:
PDF, 6.41 MB
english, 2015