Characterisation of sputter-ion pumps to be used in combination with non-evaporable getters
Porcelli, Tommaso, Siviero, Fabrizio, Bongiorno, Gero Antonio, Michelato, Paolo, Pagani, CarloVolume:
123
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2015.10.010
Date:
January, 2016
File:
PDF, 2.70 MB
english, 2016