[IEEE 2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Xi'an, China (2015.4.7-2015.4.11)] 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Investigation of reliability of MEMS gyroscopes under different shock conditions
Pan Zhang,, Chunhua He,, Jimeng Zhang,, Qiancheng Zhao,, Zhenchuan Yang,, Dacheng Zhang,, Guizhen Yan,Year:
2015
Language:
english
DOI:
10.1109/nems.2015.7147463
File:
PDF, 520 KB
english, 2015