Effects of rapid thermal annealing on LPCVD silicon nitride

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  • Effects of rapid thermal annealing on LPCVD silicon nitride

Effects of rapid thermal annealing on LPCVD silicon nitride

Jiang, Wanli, Xu, Dehui, Xiong, Bin, Wang, Yuelin
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Language:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2015.09.053
Date:
September, 2015
File:
PDF, 818 KB
english, 2015
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