Effects of rapid thermal annealing on LPCVD silicon nitride
Jiang, Wanli, Xu, Dehui, Xiong, Bin, Wang, YuelinLanguage:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2015.09.053
Date:
September, 2015
File:
PDF, 818 KB
english, 2015