Plasma fluorination of organosilicon polymeric films for gas separation applications
S. Borisov, V.S. Khotimsky, A.I. Rebrov, S.V. Rykov, D.I. Slovetsky, Yu.M. PashuninVolume:
125
Year:
1997
Language:
english
Pages:
11
DOI:
10.1016/s0376-7388(96)00254-2
File:
PDF, 843 KB
english, 1997