Fabrication of supported Si3N4 membranes using the pyrolysis of liquid polysilazane precursor
Hidetoshi Mori, Shigekazu Mase, Noriyuki Yoshimura, Tadashi Hotta, Kohichi Ayama, Jun Ichiro TsubakiVolume:
147
Year:
1998
Language:
english
Pages:
11
DOI:
10.1016/s0376-7388(98)00116-1
File:
PDF, 685 KB
english, 1998