[IEEE 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 - Alpbach, Austria (17-22 Sept. 2000)] 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) - A dynamic negative-ion mixing method using high-current heavy ions and electron beam evaporation
Kishimoto, N., Zhao, J.P., Okubo, N., Takeda, Y., Gritsyna, V.T.Year:
2000
Language:
english
DOI:
10.1109/.2000.924262
File:
PDF, 453 KB
english, 2000