[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Fabrication of vertically aligned silicon nanotubes using nanosphere beads as the mask and Bosch process
He, Yuan, Che, Xiangchen, Que, LongYear:
2015
Language:
english
DOI:
10.1109/TRANSDUCERS.2015.7181195
File:
PDF, 763 KB
english, 2015