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SPIE Proceedings [SPIE Singapore - Singapore (Monday 22 October 1990)] Optical Fabrication and Testing - Reactive ion beam etching: a fabrication process for the figuring of precision aspheric optical surfaces in fused silica
Flamm, Dieter, Haensel, Thomas, Schindler, Axel, Nickel, Andreas, Thomas, H.-J., Lorenzen, Manfred, Campbell, Duncan R. J., Johnson, CraigVolume:
1400
Year:
1991
Language:
english
DOI:
10.1117/12.360142
File:
PDF, 540 KB
english, 1991