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SPIE Proceedings [SPIE Integrated Optoelectronic Devices 2005 - San Jose, CA (Saturday 22 January 2005)] Optical Components and Materials II - Influences of the residual argon gas and thermal annealing on Ta2O5 and SiO2 thin film filters

Liu, Wen-Jen, Chen, Chih-Min, Lai, Yin-Chieh, Jiang, Shibin, Digonnet, Michel J.
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Volume:
5723
Year:
2005
Language:
english
DOI:
10.1117/12.590055
File:
PDF, 1.64 MB
english, 2005
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