UV-Nanoimprint Lithography: Structure, Materials and...

Journal of Nanoscience and Nanotechnology 2013 / 05 Vol. 13; Iss. 5

UV-Nanoimprint Lithography: Structure, Materials and Fabrication of Flexible Molds

Lan, Hongbo, Liu, Hongzhong
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Volume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.7437
Date:
May, 2013
File:
PDF, 2.83 MB
english, 2013
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