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Modeling of Temperature Effects on Micromachined Silicon Thermal Wind Sensors
Huang, Qing-An, Chen, Bei, Zhu, Yan-Qing, Qin, MingYear:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2464213
File:
PDF, 1.80 MB
english, 2015