SPIE Proceedings [SPIE International Symposium on Optoelectronic Technology and Application 2014 - Beijing, China (Tuesday 13 May 2014)] International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies - Analysis of thermodynamic effect in Si irradiated by pulsed-laser
Jin, Guofan, Zhuang, Songlin, Liu, Jennifer, Guo, Ming, Jin, Guangyong, Li, Mingxin, Ma, Yao, Yuan, Boshi, Yu, HuadongVolume:
9295
Year:
2014
Language:
english
DOI:
10.1117/12.2073029
File:
PDF, 534 KB
english, 2014