SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS
Herrmann, Cari F., DelRio, Frank W., George, Steven M., Bright, Victor M., Maher, Mary-Ann, Stewart, Harold D.Volume:
5715
Year:
2005
Language:
english
DOI:
10.1117/12.589322
File:
PDF, 100 KB
english, 2005