SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining Technology for Micro-Optics - Microsystems for diverse applications using recently developed microfabrication techniques
Dellmann, Laurent, Akiyama, Terunobu, Briand, Danick, Gautsch, Sebastien, Guenat, Olivier T., Guldimann, Benedikt, Luginbuhl, Philippe, Marxer, Cornel, Staufer, Urs, van der Schoot, Bart, de Rooij, NiVolume:
4179
Year:
2000
Language:
english
DOI:
10.1117/12.395691
File:
PDF, 2.76 MB
english, 2000