[IEEE IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS'99) - Kyongju, South Korea (17-21 Oct. 1999)] Proceedings 1999 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human and Environment Friendly Robots with High Intelligence and Emotional Quotients (Cat. No.99CH36289) - Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators
Sangwoo Lee,, Sangjun Park,, Sangwoo Yi,, Sangchul Lee,, Dong-II Dan Cho,, Byeoungju Ha,, Yongsoo Oh,, Cimoo Song,Volume:
2
Year:
1999
Language:
english
DOI:
10.1109/IROS.1999.812820
File:
PDF, 748 KB
english, 1999