[IEEE 23rd International Conference on Microelectronics (MIEL 2002) - Nis, Yugoslavia (12-15 May 2002)] 2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595) - Analysis and design of superjunction power MOSFET: CoolMOS/spl trade/ for improved on resistance and breakdown voltage using theory of novel voltage sustaining layer

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