A chip-integrated highly variable thermal flow rate sensor

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Sensors and Actuators B: Chemical 2015 / 11

A chip-integrated highly variable thermal flow rate sensor

Hoera, Christian, Skadell, Mirjam M., Pfeiffer, Simon A., Pahl, Maik, Shu, Zhe, Beckert, Erik, Belder, Detlev
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Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2015.11.009
Date:
November, 2015
File:
PDF, 1.01 MB
english, 2015
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