[OSA CLEO: Science and Innovations - Baltimore, Maryland...

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[OSA CLEO: Science and Innovations - Baltimore, Maryland (2011..-..)] CLEO:2011 - Laser Applications to Photonic Applications - Smooth and ultra-precise silicon nanowires fabricated by conventional optical lithography

Palmer, Robert, Alloatti, Luca, Korn, Dietmar, Moosmann, Markus, Huska, Klaus, Lemmer, Uli, Gerthsen, Dagmar, Schimmel, Thomas, Freude, Wolfgang, Koos, Christian, Leuthold, Juerg
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Year:
2011
Language:
english
DOI:
10.1364/cleo_si.2011.cthz1
File:
PDF, 267 KB
english, 2011
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