[OSA CLEO: Science and Innovations - Baltimore, Maryland (2011..-..)] CLEO:2011 - Laser Applications to Photonic Applications - Smooth and ultra-precise silicon nanowires fabricated by conventional optical lithography
Palmer, Robert, Alloatti, Luca, Korn, Dietmar, Moosmann, Markus, Huska, Klaus, Lemmer, Uli, Gerthsen, Dagmar, Schimmel, Thomas, Freude, Wolfgang, Koos, Christian, Leuthold, JuergYear:
2011
Language:
english
DOI:
10.1364/cleo_si.2011.cthz1
File:
PDF, 267 KB
english, 2011