Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2015 / 11
Fast and precise large area metrology of micropattern detectors using laser distance sensors
Müller, R., Biebel, O., Hertenberger, R., Lösel, P., Schaile, O.Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
DOI:
10.1016/j.nima.2015.11.003
Date:
November, 2015
File:
PDF, 1.67 MB
english, 2015