An Ideal MEMS Parametric Resonator Using a Tapered...

Procedia Engineering 2014 Vol. 87

An Ideal MEMS Parametric Resonator Using a Tapered Comb-drive

Shmulevich, Shai, Hotzen, Inbar, Elata, David
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Volume:
87
Year:
2014
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2014.11.738
File:
PDF, 428 KB
english, 2014
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