Temperature dependent performance of piezoelectric MEMS...

Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids

Pfusterschmied, G, Kucera, M, Wistrela, E, Manzaneque, T, Ruiz-Díez, V, Sánchez-Rojas, J L, Bittner, A, Schmid, U
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Volume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/10/105014
Date:
October, 2015
File:
PDF, 1.48 MB
english, 2015
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