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The influence of target history and deposition geometry on RF magnetron sputtered LiCoO2 thin films
J.F. Whitacre, W.C. West, B.V. RatnakumarVolume:
103
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0378-7753(01)00849-7
File:
PDF, 267 KB
english, 2001