Ion-implantation modification of lithium–phosphorus...

Ion-implantation modification of lithium–phosphorus oxynitride thin-films

Byoungsoo Kim, Yoon Sang Cho, Joon-Gon Lee, Kyong-Hee Joo, Kwang-Ok Jung, Jeongmin Oh, Byungwoo Park, Hun-Joon Sohn, Tak Kang, Jaephil Cho, Young-Shin Park, Joo Yeol Oh
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Volume:
109
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0378-7753(02)00036-8
File:
PDF, 161 KB
english, 2002
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