Effective Sputtering System for Deposition of Wear-Resistant and Anticorrosion Coatings
Metel, Aleksander Sergeevich, Grigoriev, Sergey Nikolaevich, Bolbukov, Vasilii Petrovich, Melnik, Yurii AndreevichVolume:
834
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.834.61
Date:
November, 2015
File:
PDF, 1.25 MB
english, 2015