CBr4-based in-situ etching of GaAs, assisted with TMAl and...

Journal of Crystal Growth 2016 / 01 Vol. 434

CBr4-based in-situ etching of GaAs, assisted with TMAl and TMGa

Della Casa, Pietro, Maaßdorf, Andre, Zeimer, Ute, Weyers, Markus
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Volume:
434
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2015.11.002
Date:
January, 2016
File:
PDF, 1.80 MB
english, 2016
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