Effect of nitrogen flow rate on structure and mechanical...

Thin Solid Films 2015 / 11 Vol. 594

Effect of nitrogen flow rate on structure and mechanical properties of Mo–Al–Si–N films prepared by direct current magnetron sputtering

Yuan, Zhigang, Sun, Li, Fang, Qianfeng, Gong, Wenbang, Wu, Xiao, Xu, Zili
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Volume:
594
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.10.015
Date:
November, 2015
File:
PDF, 997 KB
english, 2015
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