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Wafer bowing control of free-standing heteroepitaxial diamond (100) films grown on Ir(100) substrates via patterned nucleation growth
Yoshikawa, Taro, Kodama, Hideyuki, Kono, Shozo, Suzuki, Kazuhiro, Sawabe, AtsuhitoVolume:
594
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.10.021
Date:
November, 2015
File:
PDF, 1.75 MB
english, 2015