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Analytical analysis of mems capacitive pressure sensor with circular diaphragm under dynamic load using differential transformation method (DTM)
Molla-Alipour, Marzieh, Ganji, Bahram AzizollahVolume:
28
Language:
english
Journal:
Acta Mechanica Solida Sinica
DOI:
10.1016/s0894-9166(15)30025-2
Date:
August, 2015
File:
PDF, 472 KB
english, 2015