Effects of Deposition Temperature on the Structure and Hardness of BN Films Prepared by a Gradient Temperature Method
Ming'e, Wang, Shuili, Gong, Guojia, Ma, Xing, Liu, Lin, Zhang, Dawang, Wang, Wenqi, Lu, Chuang, DongVolume:
44
Language:
english
Journal:
Rare Metal Materials and Engineering
DOI:
10.1016/s1875-5372(15)30076-x
Date:
May, 2015
File:
PDF, 823 KB
english, 2015