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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV - Improving yield and reliability of FIB modifications using electrical testing
Desplats, Romain, Benbrik, Jamel, Benteo, Bruno, Perdu, Philippe, Prasad, Sharad, Hartmann, Hans-Dieter, Tsujide, TohruVolume:
3510
Year:
1998
Language:
english
DOI:
10.1117/12.324391
File:
PDF, 3.13 MB
english, 1998