Thermodynamics of Preparing BxC Condensed Phases by CVD Using BCl3-CH4-H2 as Precursors
Guodong, Sun, Juanli, Deng, Hui, Li, Qing, ZhangVolume:
44
Language:
english
Journal:
Rare Metal Materials and Engineering
DOI:
10.1016/S1875-5372(15)30056-4
Date:
April, 2015
File:
PDF, 1.35 MB
english, 2015