Thermodynamics of Preparing BxC Condensed Phases by CVD...

Thermodynamics of Preparing BxC Condensed Phases by CVD Using BCl3-CH4-H2 as Precursors

Guodong, Sun, Juanli, Deng, Hui, Li, Qing, Zhang
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Volume:
44
Language:
english
Journal:
Rare Metal Materials and Engineering
DOI:
10.1016/S1875-5372(15)30056-4
Date:
April, 2015
File:
PDF, 1.35 MB
english, 2015
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