Residual stress relaxation and stiffness in spin-coated...

Polymer 2015 / 10 Vol. 76

Residual stress relaxation and stiffness in spin-coated polymer films: Characterization by ellipsometry and fluorescence

Askar, Shadid, Evans, Christopher M., Torkelson, John M.
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Volume:
76
Language:
english
Journal:
Polymer
DOI:
10.1016/j.polymer.2015.08.036
Date:
October, 2015
File:
PDF, 1.23 MB
english, 2015
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