Newton interferometer with phase-shifting and...

Sensors and Actuators A: Physical 2015 / 10 Vol. 234

Newton interferometer with phase-shifting and phase-scanning measurement modes

Trịnh, Hưng-Xuân, Lin, Shyh-Tsong, Chen, Liang-Chia, Yeh, Sheng-Lih, Hoang, Hong-Hai
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Volume:
234
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2015.09.001
Date:
October, 2015
File:
PDF, 1.64 MB
english, 2015
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