Wafer level vacuum encapsulated tri-axial accelerometer...

Sensors and Actuators A: Physical 2015 / 12 Vol. 236

Wafer level vacuum encapsulated tri-axial accelerometer with low cross-axis sensitivity in a commercial MEMS Process

Merdassi, Adel, Kezzo, Mohamed Nizar, Xereas, George, Chodavarapu, Vamsy P.
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Volume:
236
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2015.10.014
Date:
December, 2015
File:
PDF, 5.02 MB
english, 2015
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