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Wafer fabrication yield learning and cost analysis based on in-line inspection
Tirkel, Israel, Rabinowitz, Gad, Price, David, Sutherland, DougLanguage:
english
Journal:
International Journal of Production Research
DOI:
10.1080/00207543.2015.1106609
Date:
October, 2015
File:
PDF, 727 KB
english, 2015