Thick AlN epilayer grown by using the HVPE method

Journal of the Korean Physical Society 2015 / 8 Vol. 67; Iss. 4

Thick AlN epilayer grown by using the HVPE method

Jeon, Hunsoo, Lee, Chanmi, Lee, Chanbin, Yang, Min, Yi, Sam Nyung, Ahn, Hyung Soo, Yu, Young Moon, Lee, Sang Chil, Kim, Suck-Whan, Sawaki, Nobuhiko
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Volume:
67
Language:
english
Journal:
Journal of the Korean Physical Society
DOI:
10.3938/jkps.67.643
Date:
August, 2015
File:
PDF, 763 KB
english, 2015
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